Micromechanical accelerometer integrated with MOS detection circuitry
作者： K.E. Petersen , A. Shartel , N.F. Raley
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摘要: A cantilever beam accelerometer is described in which the small sensing element integrated with and fabricated alongside MOS detection circuitry. The total area of detector/circuit combination about 15000 µm2(24 mil2). Fully compatible conventional materials processing steps are employed throughout fabrication schedule. Accelerations chip normal to its surface induce motions beam. These result capacitance variations drive simple circuit. Sensitivities 2.2 mV/g acceleration were measured, corresponding 68 nm/g, a mechanical resonant frequency kHz. results close agreement detailed calculations circuit modeling.
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