Height measuring system

作者: Jacques Roch , Michael D. Turner

DOI:

关键词:

摘要: The invention of this disclosure is a profiling and testing system that uses an air probe to determine the contour wafer containing plurality dies so electrical sensor may automatically step from die test completed in wafer.

参考文章(9)
R Rough, W Ryan, H Peters, Glassmaking diameter sensing ,(1973)
Robert C. Abbe, Noel S. Poduje, Wafer edge detection system ,(1977)
Paul D. Grimmer, John C. McKechnie, Surface profile follower and indicator system ,(1978)
Yukio Kembo, Nobuyuki Akiyama, Yasuo Nakagawa, Flatness measuring device ,(1981)
Arthur P. Verhoeven, Frank J. Ardezzone, Inker network for probing machine ,(1977)
David R. Turnbull, Lewis A. Fergason, Apparatus for wafer probing having surface level sensing ,(1975)
John C. McKechnie, Terrain contour tracking system ,(1978)
Edward C Bruns, Pneumatic measuring circuit ,(1963)