Probe card, apparatus and method for inspecting an object
作者： Sang-Kyu Yoo , Byung-Soo Moon , Yang-Gi Kim , Mi-Yeon Cho
DOI:
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摘要: A probe card, an apparatus and a method of inspecting object. In the example method, first inspection current may be divided into plurality currents. Each currents supplied to different one chips. second selectively applied chip other than example, substantially equal at least further card and/or perform method.
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