Chemical machining of silica and glass

作者: William S. DeForest , Henry V. Connelly

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摘要: A method of chemical machining glass and all single-crystal, polycrystalline amorphous forms silica like materials susceptible to etching by acid fluoride etchants. Relatively high-rate precision deep cuts is enabled using masks which are both highly adherent surfaces resistant attack concentrated hydrofluoric acid. The mask preferably a deposited composite relatively thin layer metal said covered thicker etch metal. Preferably, the surface then sealed with wax or an additional electrodeposited sealing