SURFACE ACOUSTIC WAVE DEVICE
作者： Omote Ryoichi , Takada Norihiko
DOI:
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摘要: A highly reliable surface acoustic wave device includes wiring lines that do not easily rupture at a three-dimensional portion. The plurality of elements located on piezoelectric substrate, supporting member arranged the substrate so as to enclose vibrating portions including electrodes such IDT electrodes, and cover stacked openings define hollow spaces facing electrodes. Furthermore, portion which first line second are with an insulating layer interposed therebetween is provided substrate. enclosed by member, thereby disposed inside space member.
lens.org 参考文章(30)
Takumi Kooriike, Masayuki Kitajima, Keiji Tsuda, Shunichi Aikawa, Jyouji Kimura, Kazunori Inoue, Takashi Matsuda, Acoustic wave device and method of manufacturing the same ,(2007)
Norihiko Nakahashi, Hiroki Watanabe, Teruhisa Shibahara, Yuichi Takamine, Surface acoustic wave filter and communication apparatus ,(2004)
Masanori Ueda, Osamu Kawachi, Suguru Warashina, Osamu Ikata, Surface acoustic wave device and method of fabricating the same ,(2004)
Kazuo Ikeda, Surface acoustic wave device, method of manufacturing the device, and electronic component using the device and method The Journal of the Acoustical Society of America. ,vol. 120, pp. 3443- ,(2006) , 10.1121/1.2409411
Yuichi Takamine, Method for manufacturing surface acoustic wave device and surface acoustic wave device ,(2008)
Atsushi Takano, Ryouichi Takayama, Mitsuhiro Furukawa, Surface acoustic wave device and method for manufacturing the same ,(2006)
Nobuhira Tanaka, Surface acoustic wave device and boundary acoustic wave device ,(2006)
Yasunori Kishimoto, Takashi Iwamoto, Piezoelectric device and method for producing same ,(2007)
Takashi Iwamoto, Electronic component and method of producing the same ,(2003)