Surface acoustic wave device, method of manufacturing the device, and electronic component using the device and method
作者： Kazuo Ikeda
DOI: 10.1121/1.2409411
关键词:
摘要: A surface acoustic wave device, wherein comb electrodes (2) and reflector (3) are surrounded by a plurality of auxiliary (6a, 6b) electrically independent each other having different widths according to the positions thereof, whereby charge generated pyroelectricity substrate (1) with piezoelectricity can be uniformized efficiently.
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