Absolute density and temperature of O(D21) in highly Ar or Kr diluted O2 plasma
作者： Keigo Takeda , Seigo Takashima , Masafumi Ito , Masaru Hori
DOI: 10.1063/1.2957679
关键词:
摘要: The absolute density and translational temperature of excited O atoms [O(D21)] in O2 surface-wave-excited plasmas (SWPs) with high Kr or Ar dilution were measured by using vacuum ultraviolet laser absorption spectroscopy. It was observed that the O(D21) Kr∕O2 SWP lower than Ar∕O2 above a pressure 90Pa, had an elevated around 2000K SWPs. Furthermore, flux identified as key parameter oxidation process. These results are very important knowledge relevant to plasma oxidation.
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