Measurement and control of absolute nitrogen atom density in an electron-beam-excited plasma using vacuum ultraviolet absorption spectroscopy
作者： Shigekazu Tada , Seigou Takashima , Masafumi Ito , Masaru Hori , Toshio Goto
DOI: 10.1063/1.1305559
关键词: Atomic physics 、 Cathode ray 、 Plasma 、 Plasma diagnostics 、 Absorption spectroscopy 、 Electron density 、 Dissociation (chemistry) 、 Excited state 、 Acceleration voltage 、 Chemistry
摘要: The absolute nitrogen (N) atom density in an electron-beam-excited plasma (EBEP) operating at ultralow pressure has been investigated by vacuum ultraviolet absorption spectroscopy, employing a microdischarge hollow-cathode lamp. measured N was estimated to be around 6×1011 cm−3, and the dissociation fraction 4.9% N2 of 0.05 Pa, electron-beam current 10 A, acceleration voltage 120 V. EBEP potentially enables us control electron energy independently with voltages, respectively. It found that densities increased increasing under low-pressure conditions. shows great promise as source pressure.
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