Terminal sliding mode control with non-symmetric input saturation for vibration suppression of electrostatically actuated nanobeams in the presence of Casimir force

摘要: Abstract In the present article, a robust sliding mode controller and disturbance-observer-based terminal tracking with finite time convergence are proposed for stabilization of functionally graded homogeneous nanobeam. The considered nanobeam is modeled based on nonlocal strain gradient theory Euler–Bernoulli beam subjected to Casimir force. Electrostatic actuation in governing equations system as control input modeling. Galerkin approach employed reduce nonlinear partial differential equation motion ordinary quadratic cubic nonlinearities. designed uncertain parameters which eliminates chattering. Furthermore, used presence an external load disturbance unknown non-symmetric saturation useful when constraint exists due electrostatic actuation. Simulation results presented comparisons suggested techniques accomplished mentioned also atomic force microscope second case study order show performance controllers. Finally, experimental verification has been done by using prove high precision positioning.