Robust control design for an uncertain electrostatic micro-mechanical system via loop shaping

摘要: This paper presents the design of a robust model-based controller coupled to feed-forward compensator set-point regulation maneuvers an electrostatic micro-mechanical actuator system (eµm-A) with uncertainty on its supporting springs. Linearised models nonlinear are considered at multiple operating points for short-range in distances smaller than systems bifurcation point, while feedforward provides nominal voltage. The controller, designed via ℋ ∞ loop-shaping, handles any perturbations around these guarantees robustness against switching nature linearized dynamics. Moreover, successfully tolerates variation system's uncertain parameter. performance is assessed number appropriate simulation studies prove efficacy.