作者: Marialena Vagia , George Nikolakopoulos , Anthony Tzes
DOI: 10.1007/S10846-006-9070-4
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摘要: In this article the design of an intelligent robust controller for a micro-actuator is presented. The ?-actuator composed micro-capacitor, whose one plate clamped while its other flexible plate's motion constrained by hinges acting as combination springs and dashpots. distance plates varied applied voltage between them. dynamics rigid-body results in unstable, nonlinear system. control structure constructed from: (a) feedforward which stabilizes around nominal operating point, (b) PID with gains tuned via utilization Linear Matrix Inequalities (LMIs), (c) prefilter shapes appropriately reference signal. resulting overall scheme to non-linear model where simulation are presented prove efficacy suggested scheme.