Method for manufacturing an optical device with a defined total device stress
作者： Bert Offrein , Ingmar Meijer , Dorothea W Wiesmann , Gian-Luca Bona , Huub L. Salemink
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摘要: A method for manufacturing an optical device with a defined total stress and therefrom resulting birefringence polarization dependence is disclosed. In preferred embodiment, lower cladding layer of amorphous material first refractive index provided above that upper second index, which latter manufactured from tunable in its stress. Between the waveguide core comprising having third larger than index. The thermally annealed, after it has to have together results
lens.org 参考文章(11)
Henryk Temkin, Rudolf Feodor Kazarinov, Optical waveguide structures and methods of fabrication ,(2002)
Randall E. Morton, Temperature independent fiber optic sensor ,(1985)
Bharat Bhushan, SP Murarka, Jeff Gerlach, Stress in silicon dioxide films deposited using chemical vapor deposition techniques and the effect of annealing on these stresses Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 8, pp. 1068- 1074 ,(1990) , 10.1116/1.584918
C. Blaauw, Stress in chemical‐vapor‐deposited SiO2 and plasma‐SiNx films on GaAs and Si Journal of Applied Physics. ,vol. 54, pp. 5064- 5068 ,(1983) , 10.1063/1.332779
Akira Shintani, Shojiro Sugaki, Hisao Nakashima, Temperature dependence of stresses in chemical vapor deposited vitreous films Journal of Applied Physics. ,vol. 51, pp. 4197- 4205 ,(1980) , 10.1063/1.328277
Suresh T. Gulati, George W. Scherer, Gradient index optical waveguide and method of making ,(1980)
Raymond Wolfe, Yuan P. Li, Integrated optical devices utilizing magnetostrictively, electrostrictively or photostrictively induced stress ,(1995)
Mitsuho Yasu, Kaname Jinguji, Norio Takato, Masao Kawachi, Katsunari Okamoto, Single mode channel optical waveguide with a stress-induced birefringence control region ,(1987)
Henryk Temkin, Rudolf Feodor Kazarinov, Birefringence free optical waveguide structures ,(2002)
Peter Bloechl, Bert Jan Offrein, Dorothea W. Wiesmann, Roland W. Germann, Gian-Luca Bona, Illana Massarek, Huub L. Salemink, Horst Folkert, Optical device with a defined total device stress and method for manufacturing it ,(2000)