Ag+ implantation in Al2O3, LiNbO3 and quartz
作者： M Rahmani , PD Townsend
DOI: 10.1016/0042-207X(89)91112-3
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摘要: Abstract Silver implantation in insulators produces colloids whose growth is a function of ion dose, energy, implant temperature and crystal orientation. Data for three materials are compared. Colloid favoured by higher energy implants at temperatures where the silver mobile. Preferential diffusion along Z axis Al 2 O 3 , LiNbO quartz results fraction implanted ions appearing form Y cut crystals than those cut. Annealing characteristics also show strong dependence on For anneal most rapidly whereas material least stable, their loss being accompanied reduction F centres.
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