Ion synthesis of copper nanoparticles in sapphire and their modification by high-power excimer laser pulses: A review

摘要: Composite layers made in sapphire by implantation of 40-keV Cu+ ions at a dose 1 × 1017 cm−2 and an ion beam current density varying from 2.5 to 10 μA/cm2 are studied. It is shown that makes it possible synthesize composite layer containing copper nanoparticles the surface insulator. However, nanoparticle size distribution this nonuniform. The exposed high-power excimer laser radiation with aim modifying metal it. resulting structures examined Rutherford backscattering, optical reflection spectroscopy, atomic force microscopy. found irradiation diminishes layer. Experimental data on modification may be explained photofragmentation and/or melting matrix under action nanosecond pulses.