作者: X Xiang , XT Zu , S Zhu , CF Zhang , LM Wang
DOI: 10.1016/J.NIMB.2006.04.107
关键词: Ion 、 Absorption spectroscopy 、 Materials science 、 Fluence 、 Absorption (chemistry) 、 Analytical chemistry 、 Ion implantation 、 X-ray photoelectron spectroscopy 、 Transmission electron microscopy 、 Selected area diffraction
摘要: Zn+ ion implantation (48 keV) was performed at room temperature up to a fluence of 5 x 10(17) cm(-2) in alpha-Al2O3 single crystals. X-ray photoelectron spectroscopy (XPS), transmission electron microscopy (TEM) and optical absorption were utilized characterize the properties, chemical charge states microstructure embedded metallic Zn nanoparticles, respectively. XPS analysis indicated that implanted ions are state Zn-0. TEM revealed nanoparticles 3-10 nm as-implanted sample 1 cm(-2). A selected area diffraction (SAD) pattern indicates random orientation nanoparticles. clear peak appeared gradually spectra crystals, due surface plasma resonance (SPR) The wavelength shifted from 260 285 with increasing fluence, ascribed growth (c) 2006 Elsevier B.V. All rights reserved.