Perovskite material with anion-controlled dielectric properties, thin film capacitor device, and method for manufacturing the same

摘要: A crystalline perovskite composite paraelectric material includes nano-regions containing rich N 3- anions dispersed in a nano-grain sized matrix of oxide material, wherein (ΑΒ0 3.δ ) α - 3-δ.γ Ν γ 1-α . represents divalent element, B tetravalent y satisfies 0.005< γ≤1.0, l-α 0.05<1-α<0.9, and is an area ratio between the regions remaining material.