Structural and optical characterization of DC magnetron sputtered molybdenum oxide films
作者： V. Nirupama , P. Sreedhara Reddy , O. M. Hussain , S. Uthanna
DOI: 10.1007/S11581-007-0132-9
关键词:
摘要: Thin films of molybdenum trioxide were deposited on glass substrates employing direct current (DC) magnetron sputtering by at different oxygen partial pressures in the range 8 × 10−5–1 10−3 mbar and a substrate temperature 473 K. The glow discharge characteristics cathode target studied. influence pressure structural optical properties was investigated. formed an optimum 2 10−4 polycrystalline nature with orthorhombic α- phase band gap 3.16 eV. refractive index decreased from 2.08 to 1.89 increase wavelength 450 1,000 nm, respectively.
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