Effects of oxygen contents on the electrical and optical properties of indium molybdenum oxide films fabricated by high density plasma evaporation
作者： Shi-Yao Sun , Jow-Lay Huang , Ding-Fwu Lii
DOI: 10.1116/1.1763908
关键词:
摘要: Indium molybdenum oxide (IMO) films were made from an oxidized target with In 2 O 3 and MoO 3 in a weight proportion of 99:1 by using a high density plasma evaporation with the …
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