Hydrogen induced tunnel emission in Pt/(BaxSr1−x)Ti1+yO3+z/Pt thin film capacitors
作者： J. D. Baniecki , R. B. Laibowitz , T. M. Shaw , C. Parks , J. Lian
DOI: 10.1063/1.1339207
关键词:
摘要: The leakage current density–applied field (J−EA) characteristics of (BaxSr1−x)Ti1+yO3+z (BSTO) thin film capacitors with Pt electrodes that have been annealed in forming gas (95% Ar 5% H2 or D2) were investigated over the temperature range from −60 to +60 °C. Forming annealing significantly increased density. J–EA exhibited features could not be fully explained by either a simple thermionic emission tunneling (Fowler–Nordeim) formalism. Using general charge transport theory Murphy and Good, we show can successfully interpreted terms electrons through interfacial Schottky barrier peak energy distribution incident carriers strongly dependent on applied field. At high fields is peaked near Fermi level electron injecting metal electrode at all temperatures considered this study, leading almost ind...
scitation.org
harvard.edu
aip.org
sci-hub.se 参考文章(55)
H. Margenau, Fundamental Principles of Quantum Mechanics Pure and Applied Physics. ,vol. 10, pp. 31- 80 ,(1961) , 10.1016/B978-1-4832-2791-7.50009-7
Cheol Seong Hwang, Byoung Taek Lee, Chang Seok Kang, Jin Won Kim, Ki Hoon Lee, Hag-Ju Cho, Hideki Horii, Wan Don Kim, Sang In Lee, Young Bum Roh, Moon Yong Lee, A COMPARATIVE STUDY ON THE ELECTRICAL CONDUCTION MECHANISMS OF (BA0.5SR0.5)TIO3 THIN FILMS ON PT AND IRO2 ELECTRODES Journal of Applied Physics. ,vol. 83, pp. 3703- 3713 ,(1998) , 10.1063/1.366595
H. P. R. Frederikse, W. R. Hosler, W. R. Thurber, J. Babiskin, P. G. Siebenmann, Shubnikov—de Haas Effect in SrTi O 3 Physical Review. ,vol. 158, pp. 775- 778 ,(1967) , 10.1103/PHYSREV.158.775
M. Copel, P. R. Duncombe, D. A. Neumayer, T. M. Shaw, R. M. Tromp, Metallization induced band bending of SrTiO3(100) and Ba0.7Sr0.3TiO3 Applied Physics Letters. ,vol. 70, pp. 3227- 3229 ,(1997) , 10.1063/1.119148
J. Im, O. Auciello, A. R. Krauss, D. M. Gruen, R. P. H. Chang, S. H. Kim, A. I. Kingon, Studies of hydrogen-induced degradation processes in SrBi2Ta2O9 ferroelectric film-based capacitors Applied Physics Letters. ,vol. 74, pp. 1162- 1164 ,(1999) , 10.1063/1.123474
G. M. Choi, H. L. Tuller, D. Goldschmidt, Electronic-transport behavior in single-crystalline Ba 0.03 Sr 0.97 TiO 3 Physical Review B. ,vol. 34, pp. 6972- 6979 ,(1986) , 10.1103/PHYSREVB.34.6972
L. F. Mattheiss, Energy Bands for KNiF3, SrTiO3, KMoO3, and KTaO3 Physical Review B. ,vol. 6, pp. 4718- 4740 ,(1972) , 10.1103/PHYSREVB.6.4718
D. Kahng, S. H. Wemple, Measurement of Nonlinear Polarization of KTaO3 using Schottky Diodes Journal of Applied Physics. ,vol. 36, pp. 2925- 2929 ,(1965) , 10.1063/1.1714608
I. Lundström, S. Shivaraman, C. Svensson, L. Lundkvist, A hydrogen−sensitive MOS field−effect transistor Applied Physics Letters. ,vol. 26, pp. 55- 57 ,(1975) , 10.1063/1.88053
T NORBYA, Proton conduction in oxides Solid State Ionics. pp. 857- 862 ,(1990) , 10.1016/0167-2738(90)90138-H