Block Contact Architectures for Nanoscale Channel Transistors
作者： Mark L. Doczy , Justin K. Brask , Brian S. Doyle , Marko Radosavljevic , Robert S. Chau
DOI:
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摘要: A contact architecture for nanoscale channel devices having structures coupling to and extending between source or drain regions of a device plurality parallel semiconductor bodies. The being able bodies sub-lithographic pitch.
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