Silicon substrate having textured surface, solar cell having same, and method for producing same

摘要: The purpose of the present invention is to obtain a finer texture for silicon substrate having textured surface and thereby thinner solar cell. provides that has thickness 50 [mu]m or less orientation (111), on which been formed. Such produced by process comprising step (A) preparing preferably (B) texturing blowing etching as fluorine-containing gas onto prepared substrate.