作者: Chong-Seung Yoon , Jea-hun Jung , Jae-ho Kim , Tae-Whan Kim , Young-Ho Kim
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摘要: In one aspect, a charge trap flash memory device is provided which includes semiconductor substrate, source and drain regions are spaced apart in an active region of the substrate to define channel therebetween, tunneling dielectric layer located on region, organic polymer thin film layer, metal or oxide nano-crystals embedded film, gate film.