Glow discharge optical emission spectrometry (GDOES) depth profiling analysis of anodic alumina films—a depth resolution study
作者： K. Shimizu , G. M. Brown , H. Habazaki , K. Kobayashi , P. Skeldon
DOI: 10.1002/(SICI)1096-9918(199901)27:1<24::AID-SIA457>3.0.CO;2-N
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摘要: Anodic alumina films with precisely known distributions of incorporated species have been used as standards for glow discharge optical emission spectrometry (GDOES) depth profiling analysis to quantify resolution. It is evident that the resolution GDOES excellent and comparable with, or better than, secondary ion mass similar films. Further, sensitivity detection elements also high, given amounts impurity detected successfully. Thus, GDOES, its further ability routine rapid (organic, inorganic metallic) thicknesses up several hundreds microns, has significant potential in studies corrosion filming behaviour materials. © 1999 John Wiley & Sons, Ltd.
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