25 nm CMOS Omega FETs
作者： Fu-Liang Yang , Hao-Yu Chen , Fang-Cheng Chen , Cheng-Chuan Huang , Chang-Yun Chang
DOI: 10.1109/IEDM.2002.1175826
关键词:
摘要: Low leakage and low active-power 25 nm gate length C-MOSFETs are demonstrated for the first time with a newly proposed Omega-(/spl Omega/) shaped structure, at a conservative 17…
sci-hub.se 参考文章(2)
Jong-Tae Park, J.-P. Colinge, C.H. Diaz, Pi-Gate SOI MOSFET IEEE Electron Device Letters. ,vol. 22, pp. 405- 406 ,(2001) , 10.1109/55.936358
Xuejue Huang, Wen-Chin Lee, C. Kuo, D. Hisamoto, Leland Chang, J. Kedzierski, E. Anderson, H. Takeuchi, Yang-Kyu Choi, K. Asano, V. Subramanian, Tsu-Jae King, J. Bokor, Chenming Hu, Sub-50 nm P-channel FinFET IEEE Transactions on Electron Devices. ,vol. 48, pp. 880- 886 ,(2001) , 10.1109/16.918235