Microneedle array device and its fabrication method
作者： Yu-Kon Chou , Shih-Chi Kuo
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摘要: A microneedle array device and its fabrication method are provided. The comprises a supporting pad plurality of microneedles. Each has top portion with via thereon, thereby the microfluid may flow in or out. intersection between inner tube forms convex needle structure, is almost perpendicular to upper surface. For each microneedle, hollow closed formed pad. uses substrates high transmittance area thereon as lower caps, applies photolithography process fabricate mold. It then sputters electroplates metal material on after having taken off
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