Method for determination of irreversible radiation damage of optical materials
作者： Karin Poehl , Lutz Parthier , Gordon von der Goenna , Regina Martin
DOI:
关键词:
摘要: The method determines the extent of irreversible radiation damage an optical material. includes following three tests to determine damage: 1) material is irradiated with ultraviolet at a wavelength 193 nm and non-intrinsic fluorescence intensity 740 measured; 2) high energy laser light change in respective absorptions 385 determined before after irradiation; 3) energetic source form all possible color centers difference surface integrals corresponding absorption spectra spectral and/or visible regions measured irradiation.
lens.org 参考文章(16)
Alexandre Michel Mayolet, Nikolay T. Timofeev, Detection and making of ultralow lead contaminated UV optical fluoride crystals for < 200nm lithography ,(2002)
Leonid D. Klebanov, Klaus D. Hachfeld, Method and apparatus for evaluating the quality of an optical crystal ,(2001)
Andreas Schreiber, Hans-Dieter Witzke, Franz-Josef Schilling, Erich Arnold, Bodo Kuehn, Quartz Glass Component For A Uv Radiation Source And Method For Producing And Testing The Aptitude Of Such A Quartz Glass Component ,(2005)
Masafumi Mizuguchi, Hideo Hosono, Hiroshi Kawazoe, Tohru Ogawa, Time-resolved photoluminescence for diagnosis of resistance to ArF excimer laser damage to CaF 2 single crystals Journal of The Optical Society of America B-optical Physics. ,vol. 16, pp. 1153- 1159 ,(1999) , 10.1364/JOSAB.16.001153
Wolfgang Triebel, Sylvia Bark-Zollmann, Christian Muehlig, Andreas Voitsch, Frank Coriand, Jochen Alkemper, Evaluation of fused silica for DUV laser application by short-time diagnostics International Symposium on Optical Science and Technology. ,vol. 4103, pp. 1- 11 ,(2000) , 10.1117/12.403569
Glenn E. Kohnke, Chong An, Charlene M. Smith, Paula J. Holmes, Fluence-dependent transmission in CaF 2 including correlation with thermally stimulated current Optical Microlithography XVII. ,vol. 5377, pp. 1764- 1771 ,(2004) , 10.1117/12.535651
Jochen Alkemper, Joerg Kandler, Lorenz Strenge, Ewald Moersen, Christian Muehlig, Wolfgang Triebel, Dynamic change of transmission of CaF2 single crystals by irradiating with ArF excimer laser light Proceedings of SPIE, the International Society for Optical Engineering. ,vol. 4000, pp. 1568- 1573 ,(2000) , 10.1117/12.389004
Christian Muehlig, Wolfgang Triebel, Jochen Alkemper, Regina Martin, Determining the suitability of an optical material for the production of optical elements, corresponding device, and use of said material ,(2003)
Christian Muehlig, Wolfgang Triebel, Gabriela Toepfer, Regina Martin, Method for quantitative determination of the suitability of crystals for optical components exposed to high energy densities, crystals graded in this way and uses thereof ,(2006)
Lorenz Strenge, Joerg Kandler, Burkhard Speit, Ewald Moersen, Determining radiation resistance of crystals, used e.g. in production of optical lenses, involves determining two absorption spectra over specified wavelengths using spectrophotometer ,(2000)