Dynamic change of transmission of CaF2 single crystals by irradiating with ArF excimer laser light

作者: Jochen Alkemper , Joerg Kandler , Lorenz Strenge , Ewald Moersen , Christian Muehlig

DOI: 10.1117/12.389004

关键词: Attenuation coefficientIrradiationLaserExcimer laserMaterials scienceAnalytical chemistryPulse (signal processing)Chemical equilibriumAbsorption (electromagnetic radiation)Atomic physicsQuality (physics)

摘要: The laser induced absorption of CaF2 caused by ArF excimer light has been observed at energy densities F equals 2-30 mJ/cm2 per pulse and a repetition rate R 50 Hz. experiments show that the transmission samples depends on density. change coefficient with time irradiation can be described an exponential model. Different were performed where density was increased decreased stepwise. They prove color centers not only are formed but also annihilated irradiation. Laser decrease in all as soon decreased. Coloring bleaching completely reversible processes. level quality material history damage resistance adjusted appropriate choice raw process parameters. reversibility explained reaction equilibrium. This leads to model concentration absorbing defects current conditions. Using these equations dependence explained. Assuming different dependencies constants coloring density, calculated.

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