GAS LASER APPARATUS

摘要: PURPOSE:To control discharging electric power suitably at the time of trigger discharge and to maintain stable state after transfer main discharge, by independently providing an AC source for sources a unit discharge. CONSTITUTION:A 15 controlling 10 applying voltage is provided between 14 triggers electrodes 1. When started, voltages from are applied pins 3 through capacitors 4 based on command 15. Thus linear generated. Discharge generated in region 2, which 1 face each other, owing charged particles yielded said Laser gas 9 excited laser oscillation started. Light reflected partial reflecting mirror 11 total 12. Part light outputted as 13. started 1, performed so that supply stopped. Then excessive can be prevented.