Theoretical analysis of AES depth profiling in multilayers. Application to C/W multilayers
作者： J.P. Petrakian , P. Renucci
DOI: 10.1016/0167-2584(87)90637-2
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摘要: A theoretical analysis of AES sputtering profile is developed for a single sandwich and multilayers. It shown that the variations amplitude with increasing depth can be obtained from superposition distribution functions derived statistical analysis. emphasized erf to represent intensity relative component does not take into account resolution thickness. The contributions roughness basic process are considered. Asymmetrical profiles deduced each layer an damping depth. these compared direct experimental W C/W multilayer, good fit obtained.
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