作者: Maryam Keivani , Javad Mokhtari , Naeime Abadian , Masoud Abbasi , Ali Koochi
DOI: 10.1007/S40995-017-0151-Y
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摘要: A mathematical model is used to study the effects of electrostatic, Casimir and centrifugal forces on static behaviors two U-shaped NEMS with rectangular circular geometries. The size-dependent equations are obtained by employing consistent couple stress theory (CCST). D’Alembert principle transform angular speed into an equivalent force. boundary condition technique applied for obtaining governing equation U-shape actuator. nonlinear solved different approaches, i.e., using a distributed parameter (in conjunction Rayleigh–Ritz solution method) lumped model. validated comparing results those experiment as well finite element simulation. effect various parameters instability threshold characteristics system discussed. beneficial design fabrication sensors.