Polyimide membrane for micro-heated gas sensor array
作者： M. Aslam , C. Gregory , J.V. Hatfield
DOI: 10.1016/J.SNB.2004.04.102
关键词:
摘要: Presented here is the fabrication of a polyimide (PI) membrane for potential use as a low loss microheated metal oxide (MOS) gas sensor array. Such membranes are often made from …
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