Integrated sol-gel PZT thin-films on Pt, Si, and GaAs for non-volatile memory applications
作者： Sandwip K. Dey , Rainer Zuleeg
DOI: 10.1080/00150199008018730
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摘要: … The topology and compactness of the thin-film … of PZT thinfilms under a reaction-limited condition (ie, acid catalyzed precursors with low degree of crosslinking) results in denser films …
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sci-hub.se 参考文章(4)
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