作者: Ryan C. Haislmaier , Greg Stone , Nasim Alem , Roman Engel-Herbert
DOI: 10.1063/1.4959180
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摘要: The synthesis of a 50 unit cell thick n = 4 Srn+1TinO3n+1 (Sr5Ti4O13) Ruddlesden-Popper (RP) phase film is demonstrated by sequentially depositing SrO and TiO2 layers in an alternating fashion using hybrid molecular beam epitaxy (MBE), where Ti was supplied titanium tetraisopropoxide (TTIP). A detailed calibration procedure outlined for determining the shuttering times to deposit with precise monolayer doses in-situ reflection high energy electron diffraction (RHEED) as feedback. Using optimized Sr TTIP times, fully automated growth RP carried out over period >4.5 h. Very stable RHEED intensity oscillations were observed entire period. structural characterization X-ray resolution transmission microscopy revealed that constant periodicity four SrTiO3 perovskite blocks separating double rocksalt layer maintained throughout thickness w...