作者: Changlun Chen , Bo Liang , Akihisa Ogino , Xiangke Wang , Masaaki Nagatsu
DOI: 10.1021/JP9012015
关键词:
摘要: … Ar M + O 2 →Ar + O* + O*, where Ar M is a metastable atom. The content of active oxygen also enhances with increasing of plasma power (Figure 1… the C 1s XPS spectra as a function of …