Minimizing artifact formation in magnetorheological finishing of chemical vapor deposition ZnS flats.
作者： Irina A. Kozhinova , Henry J. Romanofsky , Alexander Maltsev , Stephen D. Jacobs , William I. Kordonski
DOI: 10.1364/AO.44.004671
关键词:
摘要: The polishing performance of magnetorheological (MR) fluids prepared with a variety magnetic and nonmagnetic ingredients was studied on four types initial surface for chemical vapor deposition (CVD) ZnS flats from domestic foreign sources. results showed that it possible to greatly improve smoothing finishing (MRF) by altering the fluid composition, best obtained nanoalumina abrasive used soft carbonyl iron altered MR chemistry. Surface roughness did not exceed 20 nm peak valley 2 rms after removal μm material. formation orange peel exposure pebblelike structure inherent in CVD process were suppressed.
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