Novel silicon powder having high purity and density and method of making same

作者: Bernard Boudot , Philippe Nataf

DOI:

关键词:

摘要: A powder of elemental silicon having high purity and a density in excess about 0.6 g/cm3, preferably ranging from 0.8 to 1.2 which is non-amorphous as determined by X-ray analysis, facilely prepared thermally decomposing silane feedstream at decomposition reaction temperature 500° 700° C., 600° C.

参考文章(3)
Ralph Lutwack, George C. Hsu, Harry Levin, Richard A. Hogle, Ananda Praturi, Fluidized bed silicon deposition from silane ,(1980)
S. K. Iya, R. N. Flagella, F. S. DiPaolo, Heterogeneous Decomposition of Silane in a Fixed Bed Reactor Journal of The Electrochemical Society. ,vol. 129, pp. 1531- 1535 ,(1982) , 10.1149/1.2124200