Plasma discharge path
作者： Soh Yun Siah , Juan Boon Tan , Wanbing Yi , Haifeng Sheng , Daxiang Wang
DOI:
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摘要: A semiconductor device with a temporary discharge path. During back-end-of-line (BEOL), the path discharges plasma charge collected in well, such as floating p-type well. After processing, is rendered non-function, enabling to function properly.
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