A modified capacitance model of shunt micro switch based on MEMS technology in actuation mode: simulation and analytical study
作者： Kurmendra , Rajesh Kumar
DOI: 10.1088/1742-6596/1432/1/012007
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sci-hub.se 参考文章(13)
Koushik Guha, Mithlesh Kumar, Saurabh Agarwal, Srimanta Baishya, A modified capacitance model of RF MEMS shunt switch incorporating fringing field effects of perforated beam Solid-state Electronics. ,vol. 114, pp. 35- 42 ,(2015) , 10.1016/J.SSE.2015.07.008
Robert Bogue, Recent developments in MEMS sensors: a review of applications, markets and technologies Sensor Review. ,vol. 33, pp. 300- 304 ,(2013) , 10.1108/SR-05-2013-678
Sheng-Shian Li, CMOS-MEMS resonators and their applications international frequency control symposium. pp. 915- 921 ,(2013) , 10.1109/EFTF-IFC.2013.6702098
G.M. Rebeiz, J.B. Muldavin, RF MEMS switches and switch circuits IEEE Microwave Magazine. ,vol. 2, pp. 59- 71 ,(2001) , 10.1109/6668.969936
S. Chowdhury, M. Ahmadi, W.C. Miller, Pull-in voltage study of electrostatically actuated fixed-fixed beams using a VLSI on-chip interconnect capacitance model IEEE\/ASME Journal of Microelectromechanical Systems. ,vol. 15, pp. 639- 651 ,(2006) , 10.1109/JMEMS.2005.863784
P.D. Grant, M.W. Denhoff, R.R. Mansour, A Comparison between RF MEMS Switches and Semiconductor Switches international conference on mems, nano, and smart systems. pp. 515- 521 ,(2004) , 10.1109/ICMENS.2004.1509004
Sukanta Roy, Harikrishnan Ramiah, Ahmed Wasif Reza, Chee Cheow Lim, Eloi Marigo Ferrer, Design of a MEMS-Based Oscillator Using 180nm CMOS Technology PLOS ONE. ,vol. 11, pp. e0158954- ,(2016) , 10.1371/JOURNAL.PONE.0158954
M. Koutsoureli, D. Birmpiliotis, L. Michalas, G. Papaioannou, An in depth analysis of pull-up capacitance-voltage characteristic for dielectric charging assessment of MEMS capacitive switches Microelectronics Reliability. ,vol. 64, pp. 688- 692 ,(2016) , 10.1016/J.MICROREL.2016.07.027
Saurabh Agarwal, Richik Kashyap, Koushik Guha, Srimanta Baishya, Modeling and analysis of capacitance in consideration of the deformation in RF MEMS shunt switch Superlattices and Microstructures. ,vol. 101, pp. 567- 574 ,(2017) , 10.1016/J.SPMI.2016.10.022
A Debray, T Nakakubo, K Ueda, S Mogi, M Shibata, H Fujita, A passive micro gas regulator for hydrogen flow control Journal of Micromechanics and Microengineering. ,vol. 15, ,(2005) , 10.1088/0960-1317/15/9/S05