Surface morphology and electrical properties of BiSrCaCuO thin films deposited by reactive sputtering from multiple targets
作者： L.M. Rubin , T.P. Orlando , J.B. Vander Sande
DOI: 10.1016/0921-4534(94)90914-8
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摘要: Abstract Smooth, superconducting films of Bi 2 Sr CaCu O 8+° have been prepared by reactive sputtering from elemental targets in the presence ozone. The influence substrate temperature, deposition rate, and ozone pressure on resulting are discussed. Films deposited SrTiO 3 substrates c -axis oriented featureless for temperatures below 710°C. Above this small inclusions CuO appear. MgO exhibit mixed a orientation about 710°C, above temperature. temperature at which transition occurs increases with increasing rate. T then decreases sharply decreasing oxygen content. partial corresponding to maximum 77 K is well thermodynamic stability limit , suggesting that an optimum carrier concentration has achieved these films.
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