Thin film transistor, manufacturing method thereof, array substrate and display device
作者： Qianqian Bu , Lu Wang , Wei Guo , Lei Zhao , Qingrong Ren
DOI:
关键词:
摘要: A thin film transistor, a manufacturing method thereof, an array substrate and display device are provided. The for the transistor including: forming active layer; etch barrier layer on at position interlayer via holes subsequently; insulating layer, in to expose layer.
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