Gas inlet member of a cvd reactor

摘要: A gas inlet member of a CVD reactor includes housing having distribution volume supplied with process by feed line and multiplicity lines, each formed as tube engaging openings outlet plate arranged in front an wall, through which the enters chamber. coolant chamber adjoins wall cools ends lines that are heat-conductive contact wall. The is thereby thermally decoupled from such plate, acted on radiation heat coming chamber, heats up more intensely than extend into plate.