作者: Katsuaki Ogura , Hisashi Yamanouchi , Nahoko Nishimura , Takeshi Mori , Manabu Shibata
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摘要: To maintain a uniform etching rate during cleaning of responsive glass in electrode, responsive-glass liquid for electrode 1 serves to clean 2 used the 1, is with hydrated-layer forming solution hydrated layer on surface 2, and contains ammonium hydrogen fluoride having predetermined concentration, or salt strong base containing hydrofluoric acid ion.