Fabrication of large-area concave microlens array on silicon by femtosecond laser micromachining
作者： Zefang Deng , Qing Yang , Feng Chen , Xiangwei Meng , Hao Bian
DOI: 10.1364/OL.40.001928
关键词:
摘要: In this Letter, a novel fabrication of large-area concave microlens array (MLA) on silicon is demonstrated by combination high-speed laser scanning, which would result in single femtosecond pulse ablation surface silicon, and subsequent wet etching. Microscale microlenses with tunable dimensions accessional aspherical profile are readily obtained the 1 cm×1 cm film, useful as optical elements for infrared (IR) applications. The aperture diameter height were characterized results reveal that they both proportional to scanning speed. Moreover, property high-performance MLAs reflective homogenizer was investigated visible wavelength, it can be easily extended IR light.
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