作者: Xin Zhao , Yung C Shin
DOI: 10.1088/0022-3727/46/33/335501
关键词: Ablation 、 Silicon 、 Materials science 、 Coulomb explosion 、 Electric field 、 Fluence 、 Plasma 、 Electron 、 Ion 、 Atomic physics
摘要: In this paper, a two-dimensional hydrodynamic model is presented to investigate the femtosecond laser ablation of silicon in air. Fast electron/ion ejection and resultant early stage plasma dynamics are studied at fluence much higher than threshold (above 10 J cm−2). It revealed that splits into two portions during its expansion, comprised fast slow particles, respectively. During process, ultra-fast ion (before 0.2 ps) from surface appears occur before thermal starts. By investigating expansion speed, electric field distribution, velocity distribution different ions, occurrence Coulomb explosion (CE) demonstrated high fluence, due intense electron emission stage. leads target surface, increasing material removal rate contrast, CE absent copper, although double-layer effect exists.