Effects of tin valence on microstructure, optical, and electrical properties of ITO thin films prepared by sol–gel method

作者: Majid Mirzaee , Abolghasem Dolati

DOI: 10.1007/S10971-015-3729-X

关键词:

摘要: This study aimed to understand the microstructural, optical, and electrical properties of tin-doped indium oxide (ITO) prepared with tetravalent divalent tin salts. The influence valence on electrical, structural, morphological films were characterized by mean four-point probe, thermogravimetric analysis, differential thermal analysis (DTA), UV–Vis spectroscopy, X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), photoelectron spectroscope. XRD results revealed formation cubic bixbyite structure In2O3 a small shift in major peak position toward lower angles addition Sn2+ Sn4+. TG–DTA showed that optimum heat treatment temperatures for thin salts are 500 450 °C, respectively. FESEM decreasing valence, grain size was gradually increased. surface coverage both is similar, without any remarkable cracks. By increasing from II IV, high transparency (88.5 % visible region) low conductivity (10 kΩ/sq.) can be obtained after calcination air at which considered acceptable electrostatic antistatic applications ITO films. Haacke figures merit λ = 550 nm comprised between 2.94 × 10−5 Ω−1 1.83 × 10−5 Ω−1 salt,

参考文章(33)
J. Daniel Bryan, Daniel R. Gamelin, Doped Semiconductor Nanocrystals: Synthesis, Characterization, Physical Properties, and Applications Progress in Inorganic Chemistry. pp. 47- 126 ,(2005) , 10.1002/0471725560.CH2
H Bisht, H.-T Eun, A Mehrtens, M.A Aegerter, Comparison of spray pyrolyzed FTO, ATO and ITO coatings for flat and bent glass substrates Thin Solid Films. ,vol. 351, pp. 109- 114 ,(1999) , 10.1016/S0040-6090(99)00254-0
Mauro Epifani, Raül Díaz, Jordi Arbiol, Pietro Siciliano, Joan R. Morante, Solution Synthesis of Thin Films in the SnO2−In2O3System: A Case Study of the Mixing of Sol−Gel and Metal-Organic Solution Processes Chemistry of Materials. ,vol. 18, pp. 840- 846 ,(2006) , 10.1021/CM0522477
Bagas Pujilaksono, Uta Klement, Lars Nyborg, Urban Jelvestam, Sven Hill, Detlef Burgard, X-ray photoelectron spectroscopy studies of indium tin oxide nanocrystalline powder Materials Characterization. ,vol. 54, pp. 1- 7 ,(2005) , 10.1016/J.MATCHAR.2004.09.008
S Sen, S K Halder, S P Sen Gupta, An X-ray line profile analysis in vacuum-evaporated silver films Journal of Physics D. ,vol. 8, pp. 1709- 1721 ,(1973) , 10.1088/0022-3727/8/15/005
J-H Hwang, DD Edwards, DR Kammler, TO Mason, Point defects and electrical properties of Sn-doped In-based transparent conducting oxides Solid State Ionics. ,vol. 129, pp. 135- 144 ,(2000) , 10.1016/S0167-2738(99)00321-5
Armin Segmüller, I.C. Noyan, V.S. Speriosu, X-ray diffraction studies of thin films and multilayer structures Progress in Crystal Growth and Characterization. ,vol. 18, pp. 21- 66 ,(1989) , 10.1016/0146-3535(89)90024-5
A. Hultåker, C.G. Granqvist, Transparent and conducting ITO films: new developments and applications Thin Solid Films. ,vol. 411, pp. 1- 5 ,(2002) , 10.1016/S0040-6090(02)00163-3