Thin film transistor substrate and display using the same
作者： Seongpil Cho , Yongil Kim
DOI:
关键词:
摘要: Provided are a thin film transistor (TFT) substrate and display using the same. A TFT includes: substrate, first on including: polycrystalline semiconductor layer, gate electrode thereover, source electrode, drain second an oxide layer intermediate insulating including nitride covering overlapping wherein source, drain, electrodes between layer.
lens.org 参考文章(103)
Hiroshi Osawa, Cheng-Ho Yu, Kyung-Wook Kim, Chun-Yao Huang, Shang-Chih Lin, Yu-Cheng Chen, Szu-Hsien Lee, Ming-Chin Hung, Ting-Kuo Chang, Abbas Jamshidi Roudbari, Shih Chang Chang, Liquid Crystal Displays with Oxide-Based Thin-Film Transistors ,(2014)
Hong Xiao, Introduction to Semiconductor Manufacturing Technology ,(2000)
Shunpei Yamazaki, Kei Takahashi, Hideto Ohnuma, Driver circuit, signal processing unit having the driver circuit, method for manufacturing the signal processing unit, and display device ,(2013)
Katsunori Misaki, Kunio Matsubara, Semiconductor device, method for manufacturing semiconductor device, and display device ,(2013)
Hsing-Hung Hsieh, Chao-Shun Yang, Semiconductor device and electroluminescent device and method of making the same ,(2012)
Kazuhiro Sasaki, Shinobu Sumi, Hiroshi Matsumoto, Transistor array, manufacturing method thereof and image processor ,(2005)
Toshihiko Itoga, Takahiro Kamo, Takuo Kaitoh, Display device and fabrication method thereof ,(2006)
Mitsunori Imade, Atsuhito Murai, Hideki Kitagawa, Junya Shimada, Hajime Imai, Tetsuo Kikuchi, Shinya Tanaka, Jun Nishimura, Kazunori Morimoto, Circuit board and display device ,(2011)
Hye-Hyang Park, Ul-Ho Lee, Ki-Yong Lee, Ji-Yong Park, Jae-Bon Koo, Flat panel display device comprising polysilicon thin film transistor and method of manufacturing the same ,(2004)