Multiobjective optimization of Nd:YAG direct laser writing of microchannels for microfluidic applications

作者: Muneer Khan Mohammed , Abdulrahman Al-Ahmari , Usama Umer

DOI: 10.1007/S00170-015-7291-Z

关键词:

摘要: After entering the twenty-first century, there has been an ongoing drift toward miniaturization of discrete products in several areas. One such application is microfluidic device used biomedical applications. The challenge with manufacturing devices/biochips that they often make use broad range materials within a single chip, making it difficult to manufacture these devices conventional photolithographic-based techniques. Laser processing proved be important tool for development because accuracy, flexibility, and most one material independence offers. In this work, laser direct writing technique fabrication microfeatures AISI 1045 steel basic purpose research work assess performance machining channels by investigating effects different process parameters using design experiments (DOE) regression modeling analysis. model developed Optimal Design IV Response surface methodology taking five input including scan strategy which mostly overlooked past research. Analysis variance (ANOVA) carried out measures namely width error rectangular section, semicircular taper degree, recast layer, removal rate. Multiobjective optimization variables out, shown optimized solutions are obtained at moderate frequencies, high speed, minimum layer thickness.

参考文章(24)
Avanish Kumar Dubey, Vinod Yadava, Laser beam machining—A review International Journal of Machine Tools and Manufacture. ,vol. 48, pp. 609- 628 ,(2008) , 10.1016/J.IJMACHTOOLS.2007.10.017
F. Marty, L. Rousseau, B. Saadany, B. Mercier, O. Français, Y. Mita, T. Bourouina, Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro- and nanostructures Microelectronics Journal. ,vol. 36, pp. 673- 677 ,(2005) , 10.1016/J.MEJO.2005.04.039
G.F. Zhang, B. Zhang, Z.H. Deng, J.F. Chen, An Experimental Study on Laser Cutting Mechanisms of Polycrystalline Diamond Compacts CIRP Annals. ,vol. 56, pp. 201- 204 ,(2007) , 10.1016/J.CIRP.2007.05.049
Tara Dalton, Mark Davies, Microfluidic analysis system ,(2006)
Basem F. Yousef, George K. Knopf, Evgueni V. Bordatchev, Suwas K. Nikumb, Neural network modeling and analysis of the material removal process during laser machining The International Journal of Advanced Manufacturing Technology. ,vol. 22, pp. 41- 53 ,(2003) , 10.1007/S00170-002-1441-9
Simon Song, Kuen Yong Lee, Polymers for Microfluidic Chips Macromolecular Research. ,vol. 14, pp. 121- 128 ,(2006) , 10.1007/BF03218498
D.T. Pham, S.S. Dimov, P.V. Petkov, Laser milling of ceramic components International Journal of Machine Tools & Manufacture. ,vol. 47, pp. 618- 626 ,(2007) , 10.1016/J.IJMACHTOOLS.2006.05.002
IA Almeida, W De Rossi, MSF Lima, JR Berretta, GEC Nogueira, NU Wetter, ND Vieira Jr, None, Optimization of titanium cutting by factorial analysis of the pulsed Nd:YAG laser parameters Journal of Materials Processing Technology. ,vol. 179, pp. 105- 110 ,(2006) , 10.1016/J.JMATPROTEC.2006.03.107
Darwin R. Reyes, Dimitri Iossifidis, Pierre-Alain Auroux, Andreas Manz, Micro Total Analysis Systems. 1. Introduction, Theory, and Technology Analytical Chemistry. ,vol. 74, pp. 2623- 2636 ,(2002) , 10.1021/AC0202435