Polymer microcavity and microchannel devices and fabrication method
作者： J Gary Eden , Sung-Jin Park , Meng Lu , Brian Cunningham
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摘要: A microplasma device includes a substrate (12) and either or both of microchannel (50) microcavity (16) defined in polymer layer (18) supported by the substrate. Electrodes (14, 24) arranged with respect to material can excite plasma discharge medium contained both. method forming places curable between mold having negative volume impression microcavities and/or microchannels The is cured then separated from solid polymer.
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