Probe apparatus for measuring electrical characteristics of objects

摘要: A contact ring having probe pins is mounted in the top surface of a casing, and wafer holder table placed below ring. member comprising longitudinally extended cylindrical body are provided such manner as to be free move into out space between table, parallel upper along guide rails protruding from casing. An image which act means an electrode pads IC chip on input camera that member. With apparatus present invention, it possible position while viewing these images, there no need provide region for separate positioning. This facilitates design smaller apparatus.