Microscale ultrahigh-frequency resonant wireless powering for capacitive and resistive MEMS actuators

摘要: Abstract This paper presents a versatile chip-level wireless driving method for microelectromechanical system (MEMS) actuators. A MEMS actuator is integrated as an electrical component of coupled LCR resonant circuit, and it rectifies the energy sent through ultrahigh-frequency (UHF) radio frequency (RF) wave. Two types actuators were remotely driven using proposed method: thermal (bimorph) used R capacitive (comb-drive) C receiver circuit. We demonstrated remote actuation 13 Ω transferring 7.05 mW power with efficiency 15.8%. was achieved 500 μm diameter 5.5-turn planar coil antennas over distance 90 μm. When impedance-matching configuration (Zo = 50 Ω) used, 65 μm measured to be 55.6%, which 8.2 times greater than that simple inductor coupling. The can applied future deployment scenarios, where fragile are placed on top must directly interface environment (thus, being prone break). authors propose fabricate circuits monolithically chip, place them another transmitter chip. Thereby, chip avoid feedthrough so (a) easily replaceable if breaks, (b) move beyond wiring cable limitations. Four features underlined in article: (1) itself rectify RF owing fact governing equation involves square voltage and/or current, thereby, ensuring higher system-level any other transceiver additional rectifying components (e.g., diodes). (2) Both use coils same design, whose sizes equivalent those (hundreds micrometers). Moreover, they operated at UHF, much self-resonant (fs > GHz) when compared conventional transmitters (fs ≈ MHz). In addition, by circuits, possible not only (3) increase transmission but also (4) multiply actuator, because LC resonance. Voltage multiplication quite useful electrostatic operations movement proportional across capacitance. Comprehensive designs, implementations, demonstrations operation presented this paper, both (resistive) (capacitive) Remote includes on–off-keying without mechanical resonance amplitude modulation sinusoidal signals stimulate MEMS.